Search

Charlie Sun

Examiner (ID: 6808, Phone: (571)270-5100 , Office: P/2196 )

Most Active Art Unit
2196
Art Unit(s)
2196
Total Applications
600
Issued Applications
513
Pending Applications
45
Abandoned Applications
41

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17915180 [patent_doc_number] => 20220317576 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => LASER SYSTEM FOR SOURCE MATERIAL CONDITIONING IN AN EUV LIGHT SOURCE [patent_app_type] => utility [patent_app_number] => 17/633643 [patent_app_country] => US [patent_app_date] => 2020-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5116 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17633643 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/633643
LASER SYSTEM FOR SOURCE MATERIAL CONDITIONING IN AN EUV LIGHT SOURCE Aug 13, 2020 Pending
Array ( [id] => 16454305 [patent_doc_number] => 20200363731 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHOD FOR OPERATING AN IMAGE SENSOR [patent_app_type] => utility [patent_app_number] => 16/987504 [patent_app_country] => US [patent_app_date] => 2020-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9611 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16987504 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/987504
Image sensor, position sensor device, lithography system, and method for operating an image sensor Aug 6, 2020 Issued
Array ( [id] => 17179687 [patent_doc_number] => 11156926 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-26 [patent_title] => Vacuum actuator containment for molecular contaminant and particle mitigation [patent_app_type] => utility [patent_app_number] => 16/986751 [patent_app_country] => US [patent_app_date] => 2020-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4660 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16986751 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/986751
Vacuum actuator containment for molecular contaminant and particle mitigation Aug 5, 2020 Issued
Array ( [id] => 16454201 [patent_doc_number] => 20200363627 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => OPTICAL PATH ADJUSTING MECHANISM [patent_app_type] => utility [patent_app_number] => 16/986279 [patent_app_country] => US [patent_app_date] => 2020-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6657 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16986279 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/986279
Optical path adjusting mechanism Aug 5, 2020 Issued
Array ( [id] => 17868857 [patent_doc_number] => 20220291594 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => Lithographic Apparatus and Ultraviolet Radiation Control System [patent_app_type] => utility [patent_app_number] => 17/634702 [patent_app_country] => US [patent_app_date] => 2020-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8924 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17634702 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/634702
Lithographic Apparatus and Ultraviolet Radiation Control System Aug 4, 2020 Pending
Array ( [id] => 17853474 [patent_doc_number] => 20220283516 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT [patent_app_type] => utility [patent_app_number] => 17/637942 [patent_app_country] => US [patent_app_date] => 2020-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11060 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17637942 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/637942
ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT Aug 4, 2020 Pending
Array ( [id] => 19108635 [patent_doc_number] => 11961749 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-16 [patent_title] => Wafer detection device and wafer detection method using the same [patent_app_type] => utility [patent_app_number] => 17/623881 [patent_app_country] => US [patent_app_date] => 2020-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 7458 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 389 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17623881 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/623881
Wafer detection device and wafer detection method using the same Aug 3, 2020 Issued
Array ( [id] => 16675129 [patent_doc_number] => 20210063893 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => END FACET PROTECTION FOR A RADIATION SOURCE AND A METHOD FOR USE IN METROLOGY APPLICATIONS [patent_app_type] => utility [patent_app_number] => 16/983264 [patent_app_country] => US [patent_app_date] => 2020-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16918 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16983264 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/983264
End facet protection for a radiation source and a method for use in metrology applications Aug 2, 2020 Issued
Array ( [id] => 18667970 [patent_doc_number] => 11774865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus [patent_app_type] => utility [patent_app_number] => 17/636765 [patent_app_country] => US [patent_app_date] => 2020-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 13519 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17636765 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/636765
Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus Jul 23, 2020 Issued
Array ( [id] => 17947481 [patent_doc_number] => 20220334500 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/636452 [patent_app_country] => US [patent_app_date] => 2020-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17636452 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/636452
Method for controlling a lithographic apparatus Jul 21, 2020 Issued
Array ( [id] => 16601497 [patent_doc_number] => 20210028028 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-28 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/936041 [patent_app_country] => US [patent_app_date] => 2020-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8091 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16936041 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/936041
Apparatus and method for treating substrate Jul 21, 2020 Issued
Array ( [id] => 16979470 [patent_doc_number] => 20210223707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => IN-SITU LIGHT DETECTION METHODS AND APPARATUS FOR ULTRAVIOLET SEMICONDUCTOR SUBSTRATE PROCESSING [patent_app_type] => utility [patent_app_number] => 16/934597 [patent_app_country] => US [patent_app_date] => 2020-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6160 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16934597 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/934597
In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing Jul 20, 2020 Issued
Array ( [id] => 17868858 [patent_doc_number] => 20220291595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => Light Sources and Methods of Controlling; Devices and Methods for Use in Measurement Applications [patent_app_type] => utility [patent_app_number] => 17/626852 [patent_app_country] => US [patent_app_date] => 2020-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8464 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17626852 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/626852
Light sources and methods of controlling; devices and methods for use in measurement applications Jul 6, 2020 Issued
Array ( [id] => 17809094 [patent_doc_number] => 20220260929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => IMPROVEMENTS IN METROLOGY TARGETS [patent_app_type] => utility [patent_app_number] => 17/628668 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12074 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17628668 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/628668
Metrology targets Jul 5, 2020 Issued
Array ( [id] => 17839261 [patent_doc_number] => 20220276566 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => REAL TIME REGISTRATION IN LITHOGRAPHY SYSTEM [patent_app_type] => utility [patent_app_number] => 17/625990 [patent_app_country] => US [patent_app_date] => 2020-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3390 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17625990 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/625990
Real time registration in lithography system Jun 28, 2020 Issued
Array ( [id] => 16454304 [patent_doc_number] => 20200363730 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/913068 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40344 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -124 [patent_words_short_claim] => 298 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16913068 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/913068
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANUFACTURING METHOD Jun 25, 2020 Abandoned
Array ( [id] => 17016600 [patent_doc_number] => 11086236 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-10 [patent_title] => Exposure apparatus and exposure method, and flat panel display manufacturing method [patent_app_type] => utility [patent_app_number] => 16/911748 [patent_app_country] => US [patent_app_date] => 2020-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 39 [patent_no_of_words] => 28988 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 269 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16911748 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/911748
Exposure apparatus and exposure method, and flat panel display manufacturing method Jun 24, 2020 Issued
Array ( [id] => 17831877 [patent_doc_number] => 20220269181 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-25 [patent_title] => METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE DEVIATION [patent_app_type] => utility [patent_app_number] => 17/627844 [patent_app_country] => US [patent_app_date] => 2020-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12094 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17627844 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/627844
Method of compensating wavelength error induced by repetition rate deviation Jun 24, 2020 Issued
Array ( [id] => 16362794 [patent_doc_number] => 20200319545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => Extreme Ultraviolet Lithography System, Device, and Method for Printing Low Pattern Density Features [patent_app_type] => utility [patent_app_number] => 16/908449 [patent_app_country] => US [patent_app_date] => 2020-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15464 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16908449 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/908449
Extreme ultraviolet lithography system, device, and method for printing low pattern density features Jun 21, 2020 Issued
Array ( [id] => 16362811 [patent_doc_number] => 20200319562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => Metrology Method and Apparatus with Increased Bandwidth [patent_app_type] => utility [patent_app_number] => 16/903893 [patent_app_country] => US [patent_app_date] => 2020-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7521 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16903893 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/903893
Metrology method and apparatus with increased bandwidth Jun 16, 2020 Issued
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