Nikolai M Galitsky

Array ( [id] => 12184565 [patent_doc_number] => 20180043501 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-15 [patent_title] => 'SUBSTRATE POLISHING SYSTEM AND SUBSTRATE POLISHING METHOD' [patent_app_type] => utility [patent_app_number] => 15/664166 [patent_app_country] => US [patent_app_date] => 2017-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8968 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15664166 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14509403 [patent_doc_number] => 20190198356 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => SUBSTRATE PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 16/323537 [patent_app_country] => US [patent_app_date] => 2017-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6495 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16323537 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15513441 [patent_doc_number] => 10563298 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-02-18 [patent_title] => Wafer chuck with aerodynamic design for turbulence reduction [patent_app_type] => utility [patent_app_number] => 15/647183 [patent_app_country] => US [patent_app_date] => 2017-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 20 [patent_no_of_words] => 8159 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15647183 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13459219 [patent_doc_number] => 20180281152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-04 [patent_title] => APPARATUS AND METHOD FOR TIMED DISPENSING VARIOUS SLURRY COMPONENTS [patent_app_type] => utility [patent_app_number] => 15/646414 [patent_app_country] => US [patent_app_date] => 2017-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7032 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15646414 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18603858 [patent_doc_number] => 11745303 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Polishing body and manufacturing method therefor [patent_app_type] => utility [patent_app_number] => 16/317092 [patent_app_country] => US [patent_app_date] => 2017-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 9581 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16317092 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15481971 [patent_doc_number] => 10556314 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-11 [patent_title] => Head height adjustment device and substrate processing apparatus provided with head height adjustment device [patent_app_type] => utility [patent_app_number] => 15/636343 [patent_app_country] => US [patent_app_date] => 2017-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 23 [patent_no_of_words] => 10394 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15636343 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13715413 [patent_doc_number] => 20170368661 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-28 [patent_title] => POLISHING APPARATUS, POLISHING METHOD AND POLISHING CONTROL PROGRAM [patent_app_type] => utility [patent_app_number] => 15/633464 [patent_app_country] => US [patent_app_date] => 2017-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6141 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15633464 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13715417 [patent_doc_number] => 20170368663 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-28 [patent_title] => SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING [patent_app_type] => utility [patent_app_number] => 15/626857 [patent_app_country] => US [patent_app_date] => 2017-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6282 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15626857 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16998750 [patent_doc_number] => 11077536 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-03 [patent_title] => Slurry distribution device for chemical mechanical polishing [patent_app_type] => utility [patent_app_number] => 15/626936 [patent_app_country] => US [patent_app_date] => 2017-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 6281 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15626936 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15572491 [patent_doc_number] => 10576606 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-03 [patent_title] => Platen rotation system and method [patent_app_type] => utility [patent_app_number] => 15/626597 [patent_app_country] => US [patent_app_date] => 2017-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6856 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15626597 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11939618 [patent_doc_number] => 20170243768 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-24 [patent_title] => 'ETCHING METHOD OF GLASS SUBSTRATE AND WET ETCHING APPARATUS THEREOF' [patent_app_type] => utility [patent_app_number] => 15/589923 [patent_app_country] => US [patent_app_date] => 2017-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2664 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15589923 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15672825 [patent_doc_number] => 10600652 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-24 [patent_title] => Semiconductor device processing method for material removal [patent_app_type] => utility [patent_app_number] => 15/485043 [patent_app_country] => US [patent_app_date] => 2017-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 19 [patent_no_of_words] => 12859 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15485043 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11987119 [patent_doc_number] => 20170291274 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-12 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/475335 [patent_app_country] => US [patent_app_date] => 2017-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 10249 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15475335 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12030089 [patent_doc_number] => 20170320189 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-09 [patent_title] => 'CHEMICAL MECHANICAL POLISHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/473039 [patent_app_country] => US [patent_app_date] => 2017-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 4307 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15473039 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16518979 [patent_doc_number] => 10870183 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 15/471023 [patent_app_country] => US [patent_app_date] => 2017-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 12110 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15471023 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15822979 [patent_doc_number] => 10636685 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-28 [patent_title] => Nozzle and work polishing apparatus [patent_app_type] => utility [patent_app_number] => 15/470441 [patent_app_country] => US [patent_app_date] => 2017-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4170 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 197 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15470441 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11728501 [patent_doc_number] => 20170189944 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-06 [patent_title] => 'SYSTEM FOR CLEANING WAFER IN CMP PROCESS OF SEMICONDUCTOR MANUFACTURING FABRICATION' [patent_app_type] => utility [patent_app_number] => 15/464525 [patent_app_country] => US [patent_app_date] => 2017-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6342 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15464525 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15632853 [patent_doc_number] => 10589399 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-17 [patent_title] => Textured small pad for chemical mechanical polishing [patent_app_type] => utility [patent_app_number] => 15/461944 [patent_app_country] => US [patent_app_date] => 2017-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 19 [patent_no_of_words] => 8135 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15461944 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16218449 [patent_doc_number] => 10734271 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-04 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 15/460875 [patent_app_country] => US [patent_app_date] => 2017-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 42 [patent_no_of_words] => 15314 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 499 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15460875 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18574728 [patent_doc_number] => 11731236 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-22 [patent_title] => Method for selecting template assembly, method for polishing workpiece, and template assembly [patent_app_type] => utility [patent_app_number] => 16/094085 [patent_app_country] => US [patent_app_date] => 2017-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6954 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16094085 [rel_patent_id] =>[rel_patent_doc_number] =>)