Focal plane phase-shifting lithography | Patent Number 05717218

US 05717218 NA
Application Number8365279
Publication Number-
Pendency3 years, 1 month, 15 days
Filled DateDec 28, 1994
Priority DateDec 28, 1994
Publication Date-
Expiration DateDec 28, 2014
Inventor/Applicants Robert Keith Grygier
Hans Juergen Coufal
ExaminesNGUYEN, KIET TUAN
Art Unit2878
Technology Center2800
Assignments
International Business Machines
Current
International Business Machines
Original
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