Electronically controlled cryopump | Patent Publication Number 20010012485

US 20010012485 A1
Patent NumberUS 06318093 NA
Application Number9826692
Filled DateApr 5, 2001
Priority DateSep 13, 1988
Publication DateAug 9, 2001
Original AssigneeHelix Technology Corporation
Current AssigneeBrooks Automation Inc.
Inventor/ApplicantsDonald A. Olsen
Peter W. Gaudet
Peter W. Gaudet
Donald A. Olsen
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