Biased rotatable combdrive sensor methods | Patent Publication Number 20010040419

US 20010040419 A1
Patent Number-
Application Number9809995
Filled DateMar 14, 2001
Priority DateMar 24, 2000
Publication DateNov 15, 2001
Original Assignee
Current AssigneeOnix Microsystems
Inventor/ApplicantsBehrang Behin
Satinderpall Pannu
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