(Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process | Patent Publication Number 20030008232

US 20030008232 A1
Patent NumberUS 06746818 B2
Application Number10167444
Filled DateJun 13, 2002
Priority DateJun 13, 2002
Publication DateJan 9, 2003
Original AssigneeShinetsu Chemical Co. Ltd.
Current AssigneeShinetsu Chemical Co. Ltd.
Inventor/ApplicantsTakeshi Kinsho
Takeru Watanabe
Koji Hasegawa
Takeru Watanabe
Takeshi Kinsho
Koji Hasegawa
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