Positive-working resist composition | Patent Publication Number 20030008241

US 20030008241 A1

Patent NumberUS 06777160 B2

Application Number10093411

Filled DateMar 11, 2002

Priority DateMar 11, 2002

Publication DateJan 9, 2003

Original AssigneeFujifilm Holdings Corporation

Current AssigneeFujifilm

Inventor/ApplicantsKenichiro Sato
Kunihiko Kodama
Kunihiko Kodama
Kenichiro Sato

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