Processing platform with integrated particle removal system | Patent Publication Number 20030037456

US 20030037456 A1
Patent NumberUS 06725564 B2
Application Number10006020
Filled DateDec 6, 2001
Priority DateAug 27, 2001
Publication DateFeb 27, 2003
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Israel
Inventor/ApplicantsReginald W. Hunter
Joel Brad Bailey
Reginald W. Hunter
Joel Brad Bailey
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