Polymer, resist composition and patterning process | Patent Publication Number 20030087183

US 20030087183 A1
Patent NumberUS 06844133 B2
Application Number10230341
Filled DateAug 29, 2002
Priority DateAug 29, 2002
Publication DateMay 8, 2003
Original AssigneeShinetsu Chemical Co. Ltd.
Current AssigneeShinetsu Chemical Co. Ltd.
Inventor/ApplicantsTsunehiro Nishi
Takeshi Kinsho
Tsunehiro Nishi
Takeshi Kinsho
Koji Hasegawa
Koji Hasegawa
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