Positive-working photoimageable bottom antireflective coating | Patent Publication Number 20030129531

US 20030129531 A1
Patent NumberUS 06844131 B2
Application Number10042532
Filled DateJan 9, 2002
Priority DateJan 9, 2002
Publication DateJul 10, 2003
Original AssigneeClariant Finance Bvi Limited
Current AssigneeMerck Patent Gmbh
Inventor/ApplicantsMark O. Neisser
Joseph E. Oberlander
Shuji Ding-Lee
Ralph R. Dammel
Mark O. Neisser
Joseph E. Oberlander
Medhat A. Toukhy
Medhat A. Toukhy
Shuji Ding-Lee
Ralph R. Dammel
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