Eddy current measuring system for monitoring and controlling a CMP process | Patent Publication Number 20030201768
US 20030201768 A1Patent NumberUS 06741076 B2
Application Number10417042
Filled DateApr 14, 2003
Priority DateApr 7, 2000
Publication DateOct 30, 2003
Original Assignee
Current Assignee
Inventor/ApplicantsCuong Duy Le
Cuong Duy Le
Cuong Duy Le
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