Positioning control device for two-stage actuator | Patent Publication Number 20040004781

US 20040004781 A1
Patent NumberUS 06898039 B2
Application Number10600708
Filled DateJun 23, 2003
Priority DateJun 23, 2003
Publication DateJan 8, 2004
Original AssigneeHitachi Ltd.
Inventor/ApplicantsMasahito Kobayashi
Atsushi Okuyama
Masahito Kobayashi
Hidehiko Numasato
Hidehiko Numasato
Atsushi Okuyama
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