High repetition rate gas discharge laser with precise pulse timing control | Patent Publication Number 20040047386
US 20040047386 A1Patent NumberUS 07149234 B2
Application Number10650578
Filled DateAug 27, 2003
Priority DateJun 30, 2000
Publication DateMar 11, 2004
Original AssigneeCymer Inc.
Current AssigneeCymer Inc.
Inventor/ApplicantsWilliam N. Partlo
Helmut Schillinger
Brett D. Smith
Claudia A. Hartmann
Tobias Pflanz
Palash P. Das
Jennan Yu
Palash P. Das
Jennan Yu
Stuart L. Anderson
Brett D. Smith
Tobias Pflanz
William N. Partlo
Stuart L. Anderson
Claus Strowitzki
Stephan Geiger
Helmut Schillinger
Claus Strowitzki
Stephan Geiger
Claudia A. Hartmann
Helmut Schillinger
Brett D. Smith
Claudia A. Hartmann
Tobias Pflanz
Palash P. Das
Jennan Yu
Palash P. Das
Jennan Yu
Stuart L. Anderson
Brett D. Smith
Tobias Pflanz
William N. Partlo
Stuart L. Anderson
Claus Strowitzki
Stephan Geiger
Helmut Schillinger
Claus Strowitzki
Stephan Geiger
Claudia A. Hartmann
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