Waveguide semiconductor optical device and process of fabricating the same | Patent Publication Number 20040052490

US 20040052490 A1
Patent Number-
Application Number10411150
Filled DateApr 11, 2003
Priority DateApr 11, 2003
Publication DateMar 18, 2004
Original AssigneeMitsubishi Electric Corporation
Current AssigneeMitsubishi Electric Corporation
Inventor/ApplicantsHitoshi Tada
Yoshihiko Hanamaki
Yasunori Miyazaki
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