Fill pattern generation for spin-on glass and related self-planarization deposition | Patent Publication Number 20040157137

US 20040157137 A1
Patent NumberUS 06809389 B2
Application Number10771565
Filled DateFeb 4, 2004
Priority DateOct 24, 2001
Publication DateAug 12, 2004
Original AssigneeMicron Technology Inc.
Current AssigneeMicron Technology Inc.
Inventor/ApplicantsWerner Juengling
Philip J. Ireland
Philip J. Ireland
Werner Juengling
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