Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings | Patent Publication Number 20040210034

US 20040210034 A1
Patent Number-
Application Number10842997
Filled DateMay 11, 2004
Priority DateJan 17, 2002
Publication DateOct 21, 2004
Original Assignee
Current Assignee
Inventor/ApplicantsCharles J. Neef
Robert Christian Cox
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.