Method of preparing anti-reflective coating polymer and anti-reflecting coating composition comprising an anti-reflecting coating polymer | Patent Publication Number 20050026076

US 20050026076 A1
Patent NumberUS 07033732 B2
Application Number10903076
Filled DateJul 30, 2004
Priority DateJul 30, 2004
Publication DateFeb 3, 2005
Original AssigneeSk Group
Current AssigneeHynix Semiconductor Inc.
Inventor/ApplicantsGeun Su Lee
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