Polymer compound, resist material and pattern formation method | Patent Publication Number 20050074693

US 20050074693 A1
Patent NumberUS 07060775 B2
Application Number10954373
Filled DateOct 1, 2004
Priority DateOct 1, 2004
Publication DateApr 7, 2005
Original AssigneePanasonic
Current AssigneePanasonic
Inventor/ApplicantsShinji Kishimura
Toshiaki Fukuhara
Hirokazu Imori
Masaru Sasago
Masayuki Endo
Mitsuru Ueda
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