Nitrogen-containing organic compound, resist composition and patterning process | Patent Publication Number 20050095533

US 20050095533 A1

Patent NumberUS 07252925 B2

Application Number10974759

Filled DateOct 28, 2004

Priority DateOct 28, 2004

Publication DateMay 5, 2005

Original AssigneeShinetsu Chemical Co. Ltd.

Current AssigneeShinetsu Chemical Co. Ltd.

Inventor/ApplicantsTakeshi Kinsho
Akihiro Seki
Takeru Watanabe
Katsuya Takemura

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