Ionic photoacid generators with segmented hydrocarbonfluorocarbon sulfonate anions | Patent Publication Number 20050158655

US 20050158655 A1
Patent NumberUS 07078444 B2
Application Number11029975
Filled DateJan 5, 2005
Priority DateNov 1, 2002
Publication DateJul 21, 2005
Original Assignee3m Company
Current Assignee3m Company
Inventor/ApplicantsGregory D. Clark
Richard M. Flynn
Zai-Ming Qiu
William M. Lamanna
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