Ionic photoacid generators with segmented hydrocarbonfluorocarbon sulfonate anions | Patent Publication Number 20050158655
US 20050158655 A1Publication DateJul 21, 2005
Original Assignee3m Company
Current Assignee3m Company
Inventor/ApplicantsGregory D. Clark
Richard M. Flynn
Zai-Ming Qiu
William M. Lamanna
Richard M. Flynn
Zai-Ming Qiu
William M. Lamanna
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