Chemical amplification type positive resist composition | Patent Publication Number 20050158656

US 20050158656 A1

Patent NumberUS 07205090 B2

Application Number11037286

Filled DateJan 19, 2005

Priority DateJan 19, 2005

Publication DateJul 21, 2005

Original AssigneeSumitomo Chemical

Current AssigneeSumitomo Chemical

Inventor/ApplicantsKazuhiko Hashimoto
Ichiki Takemoto
Satoshi Yamaguchi

Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Check our Latest Report Purchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.