Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same | Patent Publication Number 20050238991

US 20050238991 A1
Patent NumberUS 07267924 B2
Application Number11099166
Filled DateApr 5, 2005
Priority DateApr 5, 2005
Publication DateOct 27, 2005
Original AssigneeSk Group
Current AssigneeHynix Semiconductor Inc.
Inventor/ApplicantsJae-chang Jung
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