Underlayer coating forming composition for lithography containing compound having protected carboxyl group | Patent Publication Number 20060210915

US 20060210915 A1
Patent NumberUS 07226721 B2
Application Number10565968
Filled DateJul 30, 2004
Priority DateJul 30, 2004
Publication DateSep 21, 2006
Original AssigneeNissan Motor Company Ltd.
Current AssigneeNissan Chemical Industries
Inventor/ApplicantsTakahiro Kishioka
Satoshi Takei
Tetsuya Shinjo
Yasushi Sakaida
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