Abrasive composition for the integrated circuit electronics industry | Patent Publication Number 20070051918

US 20070051918 A1

Patent NumberUS 07252695 B2

Application Number11594079

Filled DateNov 8, 2006

Priority DateOct 27, 1999

Publication DateMar 8, 2007

Original AssigneeAz Electronic Materials Usa

Current AssigneeMerck Patent Gmbh

Inventor/ApplicantsMaurice Rivoire
Eric Jacquinot
Pascal Letourneau

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