Calibration of high speed loader to substrate transport system | Patent Publication Number 20090030547

US 20090030547 A1
Patent NumberUS 07912576 B2
Application Number12245738
Filled DateOct 4, 2008
Priority DateNov 13, 2003
Publication DateJan 29, 2009
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Inc.
Inventor/ApplicantsRobert B. Lowrance
Kirk Van Katwyk
Jeffrey C. Hudgens
Martin R. Elliott
Amit Puri
Eric A. Englhardt
Michael R. Rice
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