Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus | Patent Publication Number 20090067959
US 20090067959 A1Publication DateMar 12, 2009
Original Assignee
Current AssigneeEbara Corporation
Inventor/ApplicantsHiroomi Torii
Hiroshi Sotozaki
Kenichi Sugita
Takahiro Ogawa
Soichi Isobe
Nobuyuki Takahashi
Takao Mitsukura
Hiroaki Nishida
Ryuichi Kosuge
Tadakazu Sone
Hiroyuki Kaneko
Hiroshi Sotozaki
Kenichi Sugita
Takahiro Ogawa
Soichi Isobe
Nobuyuki Takahashi
Takao Mitsukura
Hiroaki Nishida
Ryuichi Kosuge
Tadakazu Sone
Hiroyuki Kaneko
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