Semiconductor device and manufacturing method therefor | Patent Publication Number 20090309221

US 20090309221 A1
Patent NumberUS 08378489 B2
Application Number12544371
Filled DateAug 20, 2009
Priority DateMar 13, 2007
Publication DateDec 17, 2009
Original AssigneeFujitsu Limited
Current AssigneeFujitsu Limited
Inventor/ApplicantsEi Yano
Yoshihiro Nakata
Shiro Ozaki
Yasushi Kobayashi
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