COCRPT-BASED ALLOY SPUTTERING TARGETS WITH COBALT OXIDE AND NON-MAGNETIC OXIDE AND MANUFACTURING METHODS THEREOF | Patent Publication Number 20130008784

US 20130008784 A1
Patent Number-
Application Number13178594
Filled DateJul 8, 2011
Priority DateJul 8, 2011
Publication DateJan 10, 2013
Original AssigneeSolar Applied Materials Technology Corp.
Current AssigneeSolar Applied Materials Technology Corp.
Inventor/ApplicantsKun-Ming Chen
Wen-Tsang LIU
Hoa-Chia Liao
Yung-Chun Hsueh
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