Method for depositing a group III nitride semiconductor film | Patent Publication Number 20150140792

US 20150140792 A1
Patent NumberUS 09478420 B2
Application Number14570161
Filled DateDec 15, 2014
Priority DateJun 15, 2012
Publication DateMay 21, 2015
Original AssigneeEvatec Ag
Current AssigneeEvotec Technologies Gmbh
Inventor/ApplicantsHeinz Felzer
Lorenzo Castaldi
Martin Kratzer
Robert Mamazza, Jr.
Robert Mamazza, JR.
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