Air gap structure integration using a processing system | Patent Publication Number 20150170956

US 20150170956 A1
Patent NumberUS 09312168 B2
Application Number14523523
Filled DateOct 24, 2014
Priority DateDec 16, 2013
Publication DateJun 18, 2015
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Israel
Inventor/ApplicantsHe Ren
Zhenjiang Cui
Zhenjiang CUI
He REN
Mehul B. NAIK
Mehul B. Naik
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