Tungsten buff polishing compositions with improved topography | Patent Publication Number 20190211227

US 20190211227 A1
Patent NumberUS 10647887 B2
Application Number15864720
Filled DateJan 8, 2018
Priority DateJan 8, 2018
Publication DateJul 11, 2019
Original AssigneeEntegris
Current AssigneeCmc Materials
Inventor/ApplicantsKim Long
Pankaj K. Singh
Steven GRUMBINE
Kevin P. DOCKERY
Kim LONG
Steven Grumbine
Kevin P. Dockery
Pankaj K. SINGH
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