Low thermal budget annealing | Patent Publication Number 20190318947

US 20190318947 A1

Patent NumberUS 11195732 B2

Application Number16376031

Filled DateApr 5, 2019

Priority DateApr 12, 2018

Publication DateOct 17, 2019

Original Assignee

Current AssigneeMattson Technology

Inventor/ApplicantsPaul J. Timans

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