Post CMP cleaning compositions for ceria particles | Patent Publication Number 20200071642

US 20200071642 A1
Patent NumberUS 11085011 B2
Application Number16527809
Filled DateJul 31, 2019
Priority DateAug 28, 2018
Publication DateMar 5, 2020
Original AssigneeEntegris
Current AssigneeMorgan Stanley Senior Funding Inc.
Inventor/ApplicantsMichael White
Michael WHITE
Elizabeth Thomas
Atanu Kumar Das
Daniela White
Daniela WHITE
Elizabeth THOMAS
Atanu Kumar DAS
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