Emitter oxidation uniformity within a wafer | Patent Publication Number 20200076166

US 20200076166 A1

Patent NumberUS 11239638 B2

Application Number16244842

Filled DateJan 10, 2019

Priority DateSep 4, 2018

Publication DateMar 5, 2020

Original AssigneeLumentum Holdings

Current AssigneeLumentum Operations Llc

Inventor/ApplicantsGuowei Zhao
Benjamin Kesler
Ajit Vijay Barve

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