Imprint method, imprint apparatus, and article manufacturing method | Patent Publication Number 20200189175

US 20200189175 A1

Patent NumberUS 11584063 B2

Application Number16705514

Filled DateDec 6, 2019

Priority DateDec 6, 2019

Publication DateJun 18, 2020

Original AssigneeCanon Inc.

Current AssigneeCanon Inc.

Inventor/ApplicantsRyo Nawata

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