Support of an optical element | Patent Publication Number 20200249577

US 20200249577 A1
Patent NumberUS 11366393 B2
Application Number16780446
Filled DateFeb 3, 2020
Priority DateFeb 3, 2020
Publication DateAug 6, 2020
Original AssigneeCarlzeissstiftung
Current AssigneeCarl Zeiss Smt Gmbh
Inventor/ApplicantsEugen Anselm
Ralf Moser
Christoph Muller
Karl Fenkl
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