Aqueous composition and cleaning method using same | Patent Publication Number 20210047593

US 20210047593 A1
Patent NumberUS 11613720 B2
Application Number17049828
Filled DateApr 25, 2019
Priority DateApr 25, 2019
Publication DateFeb 18, 2021
Original AssigneeMitsubishi Electric Corporation
Current AssigneeMitsubishi Gaschemical Company Inc.
Inventor/ApplicantsToshiyuki Oie
Takahiro Kikunaga
Toshiyuki OIE
Kenji YAMADA
Kenji Yamada
Takahiro KIKUNAGA
Akinobu HORITA
Akinobu Horita
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