METHOD AND APPARATUS FOR REMOVAL OF SURFACE CARBON FROM POLYSILICON | Patent Publication Number 20210114885

US 20210114885 A1
Patent Number-
Application Number17064789
Filled DateOct 7, 2020
Priority DateOct 22, 2019
Publication DateApr 22, 2021
Original Assignee
Current AssigneeHemlock Semiconductor Operations Llc
Inventor/ApplicantsJames C. Mundell
Brian S. Cichowski
Mark Loboda
Vasgen A. Shamamian
James J. Mueller
Christopher S. Robinson
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