Beam position monitor for charged particles passing through a chamber | Patent Publication Number 20210183613

US 20210183613 A1
Patent NumberUS 11410831 B2
Application Number17122523
Filled DateDec 15, 2020
Priority DateDec 15, 2020
Publication DateJun 17, 2021
Inventor/ApplicantsRemi Nicolas
Remi NICOLAS
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