Broadband wafer defect detection | Patent Publication Number 20210333220

US 20210333220 A1

Patent NumberUS 11852593 B2

Application Number17370653

Filled DateJul 8, 2021

Priority DateNov 29, 2017

Publication DateOct 28, 2021

Original AssigneeTaiwan Semiconductor Manufacturing Company

Current AssigneeTaiwan Semiconductor Manufacturing Company

Inventor/ApplicantsNai-Han CHENG
Nai-Han Cheng
Hsing-Piao Hsu
Hsing-Piao HSU

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