Unsupervised learning for repeater-defect detection | Patent Publication Number 20220058787

US 20220058787 A1

Patent NumberUS 11810284 B2

Application Number17184189

Filled DateFeb 24, 2021

Priority DateAug 21, 2020

Publication DateFeb 24, 2022

Original AssigneeKla Corporation

Current AssigneeKla Corporation

Inventor/ApplicantsJheng Sian Lin
Boon Kiat Tay

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