Rapid Thermal Processing System With Cooling System | Patent Publication Number 20220059363

US 20220059363 A1
Patent Number-
Application Number17405142
Filled DateAug 18, 2021
Priority DateAug 18, 2020
Publication DateFeb 24, 2022
Original Assignee
Current AssigneeMattson Technology
Beijing Etown Semiconductor Technology Co. Ltd.
Inventor/ApplicantsManuel Sohn
Rolf Bremensdorfer
Dieter Hezler
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