HEATING DEVICE AND HEATING METHOD | Patent Publication Number 20220093422

US 20220093422 A1
Patent Number-
Application Number17478492
Filled DateSep 17, 2021
Priority DateSep 17, 2021
Publication DateMar 24, 2022
Original Assignee
Current AssigneeTokyo Electron Limited
Inventor/ApplicantsTakashi SUGIMOTO
Shinya OKANO
Hiroyuki TAKAHASHI
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.