SYSTEM AND METHOD OF CLEANING PROCESS CHAMBERS USING PLASMA | Patent Publication Number 20220098729

US 20220098729 A1
Patent Number-
Application Number17034937
Filled DateSep 28, 2020
Priority DateSep 28, 2020
Publication DateMar 31, 2022
Original Assignee
Current AssigneeApplied Materials Israel
Inventor/ApplicantsAbdul Aziz KHAJA
Qian SUI
Fei WU
Tuan Anh (Mike) NGUYEN
Amit Kumar BANSAL
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