Treatment Liquid for Semiconductor Wafers, Which Contains Hypochlorite Ions | Patent Publication Number 20220325205

US 20220325205 A1
Patent Number-
Application Number17847299
Filled DateJun 23, 2022
Priority DateJan 15, 2019
Publication DateOct 13, 2022
Original AssigneeTokuyama Corporation
Current AssigneeTokuyama Corporation
Inventor/ApplicantsYuki Kikkawa
Seiji Tono
Takafumi Shimoda
Takayuki Negishi
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