Exposure apparatus and method of manufacturing article | Patent Publication Number 20230013155

US 20230013155 A1
Patent NumberUS 11762299 B2
Application Number17858263
Filled DateJul 6, 2022
Priority DateJul 6, 2022
Publication DateJan 19, 2023
Original AssigneeCanon Inc.
Current AssigneeCanon Inc.
Inventor/ApplicantsKeiji Emoto
Mamoru Kaneishi
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.