METROLOGY METHOD, TARGET AND SUBSTRATE | Patent Publication Number 20230016664
US 20230016664 A1Publication DateJan 19, 2023
Original AssigneeAsml Holding
Current AssigneeAsml Netherlands B.v.
Inventor/ApplicantsMichael Kubis
Andreas Fuchs
Martin Jacobus Johan Jak
Kaustuve BHATTACHARYYA
Hendrik Jan Hidde Smilde
Maurits Van Der Schaar
Arie Jeffrey Den Boef
Xing Lan Liu
Johannes Marcus Maria Beltman
Christophe David Fouquet
Omer Abubaker Omer Adam
Richard Johannes Franciscus Van Haren
Henricus Wilhelmus Maria Van Buel
Andreas Fuchs
Martin Jacobus Johan Jak
Kaustuve BHATTACHARYYA
Hendrik Jan Hidde Smilde
Maurits Van Der Schaar
Arie Jeffrey Den Boef
Xing Lan Liu
Johannes Marcus Maria Beltman
Christophe David Fouquet
Omer Abubaker Omer Adam
Richard Johannes Franciscus Van Haren
Henricus Wilhelmus Maria Van Buel
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