SURFACE TREATMENT COMPOSITION, METHOD FOR PRODUCING SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE | Patent Publication Number 20230027432

US 20230027432 A1
Patent Number-
Application Number17939645
Filled DateSep 7, 2022
Priority DateSep 3, 2020
Publication DateJan 26, 2023
Original AssigneeFujimi Incorporated
Current AssigneeFujimi Incorporated
Inventor/ApplicantsShogo ONISHI
Tsutomu YOSHINO
Yasuto ISHIDA
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