ANNEALING APPARATUS AND METHOD OF OPERATING THE SAME | Patent Publication Number 20230060692

US 20230060692 A1
Patent Number-
Application Number17461836
Filled DateAug 30, 2021
Priority DateAug 30, 2021
Publication DateMar 2, 2023
Original Assignee
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsSEN-HONG SYUE
YI-FAN CHEN
HUICHENG CHANG
YEE-CHIA YEO
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