Method of fabricating micro-nano structure | Patent Publication Number 20230132100

US 20230132100 A1
Patent NumberUS 11675273 B2
Application Number17997102
Filled DateApr 28, 2021
Priority DateApr 28, 2021
Publication DateApr 27, 2023
Original AssigneeKorea Photonics Technology Institute
Current AssigneeInstitute Of Geology And Geophysics Chinese Academy Of Sciences
Inventor/ApplicantsMingbo Pu
Xiangang Luo
Xiong Li
Xiaoliang Ma
Yinghui Guo
Ping Gao
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